| 发明名称 |
METHOD FOR DETERMINATION OF RESIDUAL ERRORS |
| 摘要 |
There is provided a method for determining residual errors, comprising the following steps: in a first step, a test plate comprising a first pattern is used, and in a second step, a test plate comprising a second pattern which is reflected and/or rotated with respect to the first step is used. |
| 申请公布号 |
WO2008055589(A2) |
申请公布日期 |
2008.05.15 |
| 申请号 |
WO2007EP09201 |
申请日期 |
2007.10.23 |
| 申请人 |
CARL ZEISS SMS GMBH;SCHELLHORN, UWE;MANGER, MATTHIAS |
发明人 |
SCHELLHORN, UWE;MANGER, MATTHIAS |
| 分类号 |
G03F7/20 |
主分类号 |
G03F7/20 |
| 代理机构 |
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