| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a positioning apparatus, the whole of which is made light and maintenance property of which is improved. <P>SOLUTION: The positioning apparatus comprises: a fine adjustment stage 4 as a first stage which carries a positioning object; a rough adjustment stage 21 as a second stage which carries the first stage; and linear motors 1, 2 which drives the second stage, wherein the rough adjustment stage 21 as the second stage is divided into at least a pair which are in non-contact with each other to be located, and moving members of the linear motor are set on the respective parts of the divided second stage. <P>COPYRIGHT: (C)2008,JPO&INPIT |
