| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an inexpensive boat for vertical heat treatment that can be improved easily by preventing slippage from occurring due to the inclination of each support section, when heat-treating a substrate to be treated by a vertical heat-treatment oven. <P>SOLUTION: In the boat for vertical heat-treatment, at least a plurality of posts and a pair of plate members connected to both the edges of each post are provided, a plurality of support sections for supporting the substrate to be treated horizontally are formed at each post, and a support auxiliary member where the substrate to be treated is placed one by one is attached to the plurality of support sections detachably. In the boat for vertical heat-treatment, a surface attached to the support section is machined to the shape of each support section in the support auxiliary member, or a spacer is interposed between the support section and the support auxiliary member, thus adjusting the inclination of a surface where the substrate to be treated is placed for each support section. <P>COPYRIGHT: (C)2008,JPO&INPIT</p> |
