发明名称 BULK SINGLE CRYSTAL GALLIUM NITRIDE AND METHOD OF MAKING SAME
摘要 A single crystal M*N article, which may be made by a process including the steps of: providing a substrate of material having a crystalline surface which is epitaxially compatible with M*N; depositing a layer of single crystal M*N over the surface of the substrate; and removing the substrate from the layer of single crystal M*N, e.g., with an etching agent which is applied to the substrate to remove same, to yield the layer of single crystal M*N as said single crystal M*N article. The bulk single crystal M*N article is suitable for use as a substrate for the fabrication of microelectronic structures thereon, to produce microelectronic devices comprising bulk single crystal M*N substrates, or precursor structures thereof.
申请公布号 US2008127884(A1) 申请公布日期 2008.06.05
申请号 US20080030198 申请日期 2008.02.12
申请人 CREE, INC. 发明人 TISCHLER MICHAEL A.;KUECH THOMAS F.;VAUDO ROBERT P.
分类号 C30B23/02;C30B33/00;H01L21/205;H01L33/00 主分类号 C30B23/02
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