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发明名称
VENTIL MIT ZWEI SCHIEBERN UND DESSEN ANWENDUNG
摘要
申请公布号
DE60036371(T2)
申请公布日期
2008.06.05
申请号
DE2000636371T
申请日期
2000.02.29
申请人
LAM RESEARCH CORP.
发明人
KROEKER, TONY R.;MOORING, BENJAMIN W.;BRIGHT, NICOLAS J.
分类号
F16K51/02;F16K3/18;H01L21/00;H01L21/677
主分类号
F16K51/02
代理机构
代理人
主权项
地址
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