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发明名称
Vorrichtung zur Erzeugung von Plasma
摘要
申请公布号
DE19628952(B4)
申请公布日期
2008.06.05
申请号
DE19961028952
申请日期
1996.07.18
申请人
MUEGGE ELECTRONIC GMBH
发明人
RAEUCHLE, EBERHARD;MUEGGE, HORST;RAEUCHLE, FRITZ KONSTANTIN
分类号
H05H1/46;H01J37/32
主分类号
H05H1/46
代理机构
代理人
主权项
地址
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