| 摘要 |
A pressure cavity is durable, stable, and biocompatible and configured in such a way that it constitutes pico to nanoliter-scale volume. The pressure cavity is hermetically sealed from the exterior environment while maintaini ng the ability to communicate with other devices. Micromachined, hermeticall y-sealed sensors are configured to receive power and return information thro ugh direct electrical contact with external electronics. The pressure cavity and sensor components disposed therein are hermetically sealed from the amb ient in order to reduce drift and instability within the sensor. The sensor is designed for harsh and biological environments, e.g. intracorporeal impla ntation and in vivo use. Additionally, novel manufacturing methods are emplo yed to construct the sensors.
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