| 摘要 |
PROBLEM TO BE SOLVED: To provide a cleaning device capable of realizing rapid cleaning. SOLUTION: Filaments 90a, 90b, 90c are mounted in respective space parts of holders 30a, 30b, 30c with samples 70a, 70b, 70c mounted on upmost parts of the respective space parts. Electrodes for voltage application 80a, 80b, 80c are provided on parts for supporting the samples 70a, 70b, 70c. A current can be applied on the filament from one power supply 100 for heating a filament through a switching circuit 110, and a voltage can be applied on an optional electrode from one power supply 120 for voltage application through a switching circuit 130. COPYRIGHT: (C)2008,JPO&INPIT
|
