| 摘要 |
PROBLEM TO BE SOLVED: To provide a defect review method and its device, which improves the operability and convenience, and has a function capable of retrieving a clue to the investigation of a cause at an early stage. SOLUTION: Defects of a body to be inspected are reviewed based on the information acquired by an appearance inspection device for inspecting the appearance of the body to be inspected. A defect map which specifies the existence of the defect in the inspection region of the body to be inspected is displayed on the screen. A list of defect images is displayed on the screen in parallel with the defect map, in which defect image display surfaces prepared corresponding to many defects within the defect map are arranged. An operation input signal which specifies an arbitrary defect on the defect map is received. The operation signal which specifies a display surface corresponding to the arbitrary defect in the list of defect images is received. When the signal which specifies the arbitrary defect on the list of defect images is received, the display surface corresponding to the specified defect in the list of defect images is displayed discriminatedly from the display screen of the other defects. When the signal which specifies the arbitrary defect in the list of defect images is received, the specified defect in the list of defect images is displayed discriminatedly from the other defects. COPYRIGHT: (C)2008,JPO&INPIT
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