| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for easily producing the subject compound useful as e.g. a dissolution inhibitor for a chemically amplified resist in a relatively moderate condition by hydrogenating a specific aromatic oxyalkanecarboxylate in the presence of a metal hydride catalyst. SOLUTION: This compound of the formula Xm -Z'-[OR<1> COOR<2> ]n (Z' is a hydroaromatic group corresponding to Z) is obtained by hydrogenating a compound [e.g. 2,2-bis(4-t-butoxycarbonylmethylene oxyphenyl)propane] of the formula Xm -Z-[OR<1> COOR<2> ]n [Z is an aromatic group of (m+n)-valent comprising an aromatic ring of formulae I to III; Y is a single bond or the like; X is a substituted group of OH or the like on Z; OR<1> COOR<2> is a substituted group on Z; R<1> is an 1-8C alkylene or the like; R<2> is an 1-8C alkykyl or the like; 0<=m<=4, 1<=n<=4, and (m+n)<=5 when Z is formula I] in the presence of a metal hydride catalyst e.g. rhodium/carbon or the like. |
