| 摘要 |
A rack master and a stocker having the same are provided to secure data with regard to level deformation of the rack master by easily installing a leveling sensing member, thereby preventing an accident due to the level deformation. A rack master(118) includes a rack master body unit(120), a traveling unit(130), a lifting unit(134), a robot arm unit(136), and a leveling sensing member(142). The traveling unit is installed at a lower part of the rack master body unit and travels in a predetermined traveling direction. The lifting unit is installed on the traveling unit and is vertically lifted by a lifting auxiliary member installed at a vertical unit(122) of the rack master body unit. The robot arm unit is installed on the lifting unit and horizontally carries a cassette(156) loaded with a substrate. The leveling sensing member checks level deformation of at least one of the rack master body unit, the traveling unit, and the robot arm unit.
|
