发明名称 |
Gas valve assembly and apparatus using the same |
摘要 |
A gas valve assembly for a deposition apparatus includes: a driving shaft including a plurality of gas supply paths therein; a housing surrounding the driving shaft and including a plurality of through holes therein; a plurality of magnetic seal pairs between the driving shaft and the housing, the plurality of magnetic seal pairs including a magnetic fluid; and a leakage-preventing means between the driving shaft and the housing, the leakage-preventing means preventing a leakage of the magnetic fluid.
|
申请公布号 |
US7381274(B2) |
申请公布日期 |
2008.06.03 |
申请号 |
US20040870598 |
申请日期 |
2004.06.16 |
申请人 |
JUSUNG ENGINEERING COL, LTD. |
发明人 |
LEE SANG-GON |
分类号 |
C23C16/455;H01L21/20;C23C16/44;C23F1/00;H01L21/306 |
主分类号 |
C23C16/455 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|