LIGHT REFLECTION FOR BACKSIDE ILLUMINATED SENSOR

摘要

A light reflection for backside illuminated sensor is provided to reflect effectively a corresponding radiation beam by using a light reflective layer. A semiconductor substrate(110) includes a front surface and a rear surface. A sensor element(120) is formed on the front surface of the semiconductor substrate. A light reflective layer(130) is arranged on the semiconductor substrate. The light reflective layer has a reflective surface to the sensor element. The reflective surface is at least 80% of the surface area of the sensor element. The sensor element includes an active pixel sensor or a passive pixel sensor. The light reflective layer has reflectance of 30% as a minimum value with respect to backside illuminated light.