| 摘要 |
A member for supporting a side of a substrate and a substrate treating apparatus with the same, and a method for uniting and separating the same are provided to perform easily a maintenance process by coupling and decoupling rapidly a side roller and a supporting shaft. A side roller(110) comes in contact with a side of a substrate in order to be rotated while a substrate is transferred. A supporting shaft(120) is inserted into a combination hole formed at the side roller in order to support and rotate the side roller. The supporting shaft includes a fixing member(124) and a plurality of combination tips(122a,122b) extended from the fixing member. Each of the combination tips has a flexible characteristic in order to be contracted elastically to a diameter smaller than a diameter of the combination hole in a coupling/decoupling process of the side roller.
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