发明名称 POLISHING APPARATUS
摘要 THE SMALL POLISHING APPARATUS IS CAPABLE OF SIMULTANEOUSLY POLISHING BOTH SIDE FACES OF A WORK PIECE, AND A LOWER POLISHING PLATE (10), AN INTERNAL GEAR (14) AND A SUN GEAR (16) ARE RESPECTIVELY DRIVEN BY DIRECT DEIVE (DD) MOTORS ( 24, 28, 40 ).THE POLISHING APPARATUS COMPRISES: AN UPPER AND LOWER POLISHING PLATES (10, 12): A SUN GEAR (16) AND AN INTERNAL GEAR (14); AND ENGAGED WITH THE GEARS. BOTH SIDE FACES OF THE WORK PIECE HELD BY THE CARRIER (18) ARE SIMULTANEOUSLY POLISHING BY THE POLISHING PLATES (10, 12). DD MOTORS RESPECTIVELY ROTATE THE LOWER POLISHING PLATE AND THE GEARS. EACH DD MOTOR HAS A RING-SHAPED OUTPUT MEMBER. A FIRST DD MOTOR (24) HAS THE OUTPUT MEMBER (26) DIRECTLY CONNECTED TO A ROTARY HOLDING MEMBER (20) ROTATABLY HOLDING THE LOWER POLISHING PLATE (10). A SECOND DD MOTOR (28) IS PROVIDED UNDER THE FIRST 15 DD MOTOR (24). ONE END OF A ROTARY SHAFT (32), WHICH IS PIERCED THROUGH THE FIRST DD MOTOR (24), IS CONNECTED TO A ROTARY HOLDING MEMBER (34) ROTATABLY HOLDING ONE OF THE GEARS. AND THE OTHER END IS DIRECTLY CONNECTED TO THE OUTPUT MEMBER (30) OF THE SECOND DD MOTOR (28).(FIG 1)
申请公布号 MY135534(A) 申请公布日期 2008.05.30
申请号 MY2005PI00001 申请日期 2005.01.03
申请人 FUJIKOSHI MACHINERY CORP. 发明人 MAKOTO NAKAJIMA
分类号 B24B37/04;B24B37/08;B24B47/12;H01L21/304 主分类号 B24B37/04
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