发明名称 METHOD AND APPARATUS FOR PRODUCING THIN SHEET
摘要 PROBLEM TO BE SOLVED: To provide a method and an apparatus for producing thin sheet in which its production efficiency can greatly be enhanced and the production cost per unit area can be reduced remarkably through stabilization of quality. SOLUTION: The thin sheet production method includes dipping a substrate S into a melt 1007, pulling up the substrate, solidifying the melt on the surface thereof to form a thin sheet P and then taking out the thin sheet P from the substrate S. In the method, the data by which the thickness of the formed thin sheet P can be specified are measured, and the output of a heating mechanism 1005 for heating the melt 1007 is controlled on the basis of the measured thickness. Thereby, the temperature of the melt 1007 is controlled so as to stabilize the thickness of the thin sheet P to be formed resulting in its stable quality. COPYRIGHT: (C)2008,JPO&INPIT
申请公布号 JP2008120642(A) 申请公布日期 2008.05.29
申请号 JP20060308133 申请日期 2006.11.14
申请人 SHARP CORP 发明人 KOMA SHUJI
分类号 C30B28/04;C01B33/02;H01L21/208 主分类号 C30B28/04
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