| 摘要 |
An ultrasonic motor includes a vibrator formed by stacking a plurality of rectangular piezoelectric plates in a thickness direction, a driving circuit for applying a driving signal to a piezoelectric plate, and a detection circuit for detecting an electromotive force generated when the piezoelectric plate deforms, and this ultrasonic motor is configured in such a manner that there are a first piezoelectric plate and a second piezoelectric plate among the plurality of rectangular piezoelectric plates, the first and the second piezoelectric plate each is a piezoelectric plate in which a longitudinal vibration polarization portion that can excite longitudinal vibrations and a bending vibration polarization portion that can excite bending vibrations are polarized in a thickness direction, and the first piezoelectric plate is connected to the driving circuit and the detection circuit, and the second piezoelectric plate is connected to the driving circuit and is not connected to the detection circuit.
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