| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a heat treatment apparatus of a manufacturing object, a heat treatment method, and a method for manufacturing a piezoelectric device, which can prevent variation during manufacturing even if the manufacturing objects are arranged in a chamber in a height direction and can shorten manufacturing time. <P>SOLUTION: The heat treatment apparatus includes a chamber 40 which can house a plurality of manufacturing objects being arranged in a height direction, a gas supply means 76 to charge gas in the chamber 40, a radiation type heating means 60 to heat the manufacturing objects by radiant heat, a churning means 70 to churn the gas in the chamber 40 while the radiation type heating means 60 is working, and a vacuum generating means 74 to vacuumize the chamber 40 by discharging the gas. <P>COPYRIGHT: (C)2008,JPO&INPIT |
