发明名称 ADHESIVE SHEET AND SEMICONDUCTOR DEVICE AND PROCESS FOR PRODUCING THE SAME
摘要 <p><P>PROBLEM TO BE SOLVED: To provide an adhesive sheet which acts as a dicing tape in a dicing process and acts as an adhesive sheet which is excellent in connection reliability in a joining process between a semiconductor element and a supporting member. <P>SOLUTION: The adhesive sheet comprises a pressure-sensitive adhesive layer and a substrate layer, wherein the strength of adhesion between the pressure-sensitive adhesive layer and the substrate layer is controlled by means of the irradiation with radiation and the pressure-sensitive adhesive layer (A1) has 200 mN/cm or more of the strength of adhesion between the pressure-sensitive adhesive layer and the substrate layer before the irradiating and has at least one characteristic in the following characteristics: (B1) the amount of flow at 160°C before the irradiating is 100-10,000μm; and (B-2) the melt viscosity at 160°C before the irradiating is 50-100,000 Pa s. <P>COPYRIGHT: (C)2008,JPO&INPIT</p>
申请公布号 JP2008121017(A) 申请公布日期 2008.05.29
申请号 JP20070297214 申请日期 2007.11.15
申请人 HITACHI CHEM CO LTD 发明人 KAWAKAMI HIROYUKI;INADA TEIICHI;MASUKO TAKASHI;OKUBO KEISUKE;HATAKEYAMA KEIICHI;YANAGAWA TOSHIYUKI;KATOGI SHIGEKI
分类号 C09J7/02;B32B27/00;C09J5/00;C09J201/00;H01L21/301;H01L21/52 主分类号 C09J7/02
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