| 摘要 |
PROBLEM TO BE SOLVED: To reduce the size in an electrostatic capacitance type acceleration sensor. SOLUTION: This electrostatic capacitance type acceleration sensor 1 is provided with a fixed member 2 having a fixed electrode 21, and a movable member 3 arranged opposite to the fixed electrode 21, and having a weight part 33 functioned as a movable electrode. The fixed member 2 is formed of a silicon substrate. The silicon substrate is formed with a signal processing IC 22 for processing a detection signal, and through holes 2a, 2b penetrating respectively through the signal processing IC 22, the movable electrode and the fixed electrode 21. A chip for forming the signal processing IC 22 is not required, thereby to be provided, and the chip is not required also to be connected, respectively to the movable electrode and the fixed electrode 21. Hence, the number of the chips is reduced, and a wiring space for wires is reduced in a printed circuit board. As a result, a mounting area is reduced in the printed circuit board to reduce the size. COPYRIGHT: (C)2008,JPO&INPIT
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