MICRO OBJECT EVALUATION DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a micro object evaluation device capable of evaluating easily and quickly a formation condition of a micro object contained in a substance. SOLUTION: A light is emitted from a light source 1 toward a surface of a layer containing a fine particle, to receive a reflected light emitted from an incident side of the light in the layer by an optical measuring part 2. The optical measuring part 2 measures a distribution of light intensity in a wavelength of the reflected light obtained from the layer. A calculation part 20 calculates a distribution of light intensity in a wavelength of a reflected light from a model, based on a plurality of assumed elements in the model comprising the layer and the fine particle. A comparison part 30 collates the distribution of the reflected light measured by the optical measuring part 2 with the distribution of the reflected light calculated by the calculation part 20. COPYRIGHT: (C)2008,JPO&INPIT