| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an easy-to-assemble inertia drive actuator with high drive speed. <P>SOLUTION: The inertia drive actuator comprises a fixed member 10, an oscillatory substrate 30 arranged on the fixed member 10, a moving element 40 arranged on the oscillatory substrate 30, and a piezoelectric element 20 for reciprocating the oscillatory substrate 30 above the fixed member 10. The moving element 40 has a first electrode 41, and the oscillatory substrate 30 has a second electrode 31. The first electrode 41 and the second electrode 31 oppose each other partially through an insulating film 35. An area of the opposing portion of the first electrode 41 and the second electrode 31 varies continuously as the moving element 40 moves. The inertia drive actuator further comprises a means 70 for controlling the frictional force between the oscillatory substrate 30 and the moving element 40 by applying a voltage between the first electrode 41 and the second electrode 31, and a means 80 for detecting the position of the moving element 40 by checking capacitance at the opposing portion of the first electrode 41 and the second electrode 31. <P>COPYRIGHT: (C)2008,JPO&INPIT |
