GENERATING METHOD OF CALIBRATED PUPIL KERNEL, PROGRAM, APPARATUS, AND USAGE IN LITHOGRAPHY SIMULATION PROCESS

摘要

PROBLEM TO BE SOLVED: To provide a generating method of a model in which simulation of image forming performance of an optical image forming system having a pupil is carried out.

SOLUTION: This method includes steps of: defining the optical image forming system and a process that the optical image forming system utilizes; and defining a model expression taking in a calibrated pupil kernel, which expresses image forming performance of both the optical image forming system and process, wherein the calibrated pupil kernel represents a linear model of pupil performance.

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