| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a laser beam machining apparatus capable of constantly setting the focal point by controlling the height position of an optical element for focusing or condensing machining laser beams on the surface corresponding to the fluctuation of the height of the surface of an object to be machined by laser beams. <P>SOLUTION: The laser beam machining apparatus comprises an objective optical device 6 for condensing machining laser beam on the surface of a workpiece 5 to be machined, and a height sensor 1 for measuring the height position of a part of the workpiece 5 irradiated with the machining laser beams. The objective optical device 6 is vertically moved corresponding to the fluctuation of the height position of the surface of the workpiece 5 so as to constantly set the focus to the workpiece. The height sensor 1 is arranged on the fore end side of the moving direction of the machining laser beams of the objective optical device 6 to measure the height position before applying the machining laser beams. Every time when the position of application of the machining laser beams reaches the position of measurement, the objective optical device 6 is moved corresponding to the measured height position. The measurement of the height position and the movement of the objective optical device 6 can be independently performed, and even when the moving speed of the machining laser beams is increased, the objective optical device 6 can be moved accordingly. <P>COPYRIGHT: (C)2008,JPO&INPIT</p> |
