| 摘要 |
PROBLEM TO BE SOLVED: To impart suitable properties such as volatility and melting point-lowering property to a bisalkoxy zinc compound having sufficient reactivity as a precursor for supplying zinc to thin films to provide a zinc compound especially suitable as a raw material for CVD. SOLUTION: The zinc compound is represented by general formula (1) (wherein, one of R<SP>1</SP>and R<SP>2</SP>is ethyl or isopropyl, and the other is H, methyl, ethyl or isopropyl; R<SP>3</SP>is a 1 to 4C alkyl). COPYRIGHT: (C)2008,JPO&INPIT |
