| 摘要 |
PROBLEM TO BE SOLVED: To provide a versatile focus detecting device used in the microscope technique. SOLUTION: The light source 26a emits illumination light to observe a sample S. At this point, the light from the sample S is focused by the imaging lens 29 after passing the objective lens 3a to form the image of the sample S. The CCD camera 30 takes this image. The reference light source 4 emits light to the sample S for focus detecting. At this point, the light from the sample S is focused near the light receiving surface of the light detector 14 by the focusing system 13 after passing the objective lens 3a. The controller 23 detects the displacement between the image by the objective lens 3a and the sample S from the electric signals which the light detector 14 outputs by converting the received light. The system controller 32 alternately turns on the light source 26a and the reference light source 4 and makes the CCD camera 30 take the observation image only when the lighting source 26a is on. COPYRIGHT: (C)2008,JPO&INPIT |
