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发明名称
SYSTEM UND VERFAHREN ZUR ERZEUGUNG EINER FEHLERFREIEN SCHNELLEN THERMISCHEN BEHANDLUNG
摘要
申请公布号
DE60133624(D1)
申请公布日期
2008.05.29
申请号
DE20016033624
申请日期
2001.05.22
申请人
WAFERMASTERS INC.
发明人
YOO, WOO SIK
分类号
H01L21/00;H01L21/26
主分类号
H01L21/00
代理机构
代理人
主权项
地址
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