METHOD FOR MANUFACTURING SOLAR CELL AND APPARATUS FOR MANUFACTURING SOLAR CELL

摘要

A solar cell having high energy conversion efficiency is produced. The surface layer of an n-type polycrystalline silicon layer formed on a p-type polycrystalline silicon substrate is oxidized by using a plasma, and then a silicon nitride film is deposited thereon by CVD, thereby forming a passivation film on the surface layer of the polycrystalline silicon layer. The plasma oxidation process is performed at a pressure within the range of 6.67-6.67 OE10² Pa at a temperature within the range of 200-600°C by using a plasma of a sheath potential of not more than 10 eV. A microwave for exciting a plasma is supplied into a process chamber through a slot antenna, and a plasma is generated by the surface wave of the microwave.