| 摘要 |
PROBLEM TO BE SOLVED: To obtain a precise unevenness image of a sample surface by solving problems affected by changes in an oscillation amplitude of a cantilever. SOLUTION: A scanning probe microscope comprises a cantilever 6 of which one end is fixed; a probe 6 fixed to the other end of the cantilever 5 and arranged opposed to a sample 1; a piezoelectric element 7 for excitation that vibrates the cantilever 5; an amplitude adjusting circuit 12 that controls the piezoelectric element 7 so that the cantilever vibrates at a natural frequency thereof or at the neighborhood frequency and therewith generates an excitation voltage so as to maintain the vibration amplitude of the cantilever 5 constant; an FM modulator 14 for converting a voltage corresponding to changes in the vibration frequency of the cantilever 5; an error amplifier 15 for outputting the difference between the output of the FM modulator 14 and a reference voltage; a Z scanner driving circuit 17 for controlling the distance between the probe 6 and the sample 1 constant based on the output of the error amplifier 15; an TMS-DC19 for converting the amplitude changes of the cantilever 5; and an adder 20 for adding the output of the RMS-DC19 to the output of the error amplifier 15, wherein the unevenness image of the sample 1 is obtained based on the outputs of the adder 20. COPYRIGHT: (C)2008,JPO&INPIT
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