METHOD OF CONCENTRATING OZONE GAS AND APPARATUS THEREFOR

摘要

A method of ozone concentrating in which despite a simple apparatus setup, an ozone gas of given concentration can be efficiently drawn out; and an apparatus therefor. There is provided a method of concentrating an ozone gas, comprising applying a gas of ozone/oxygen mixture to an adsorption tube filled thereinside with an adsorbent to thereby effect selective adsorption of ozone gas on the adsorbent and desorbing the selectively adsorbed ozone gas to thereby effect concentrating purification of ozone gas, wherein the gas of ozone/oxygen mixture is applied to the adsorbent held not cooled to thereby effect selective adsorption of ozone gas on the adsorbent, and wherein at the operation of ozone gas desorption, the adsorption tube is vacuumed to thereby attain desorption of the ozone gas from the adsorbent.