ELECTROMAGNETIC MICRO-ACTUATOR

摘要

PROBLEM TO BE SOLVED: To provide an electromagnetic micro-actuator that suppresses or prevents deformation of a mirror unit caused by resistance heat of a driving coil and that has reduced moment of inertia. SOLUTION: The electromagnetic micro-actuator is characterized in that it includes a stage 120 rotatably formed on a surface of a substrate 110; a pair of torsion springs 132 respectively connected to opposite sides of the stage 120 in a rotation axis direction; a fixed frame 150 that supports the torsion springs 132 and surrounds the stage 120; the driving coil 130 wound to a predetermined depth in an upper surface of the stage 120; the mirror unit 140 formed away from the formed part of the driving coil 130, and a pair of permanent magnets 160 respectively formed away from the driving coil 130 on opposite sides so as to face each other across the driving coil 130. COPYRIGHT: (C)2008,JPO&INPIT