发明名称 DEVICE FOR DETERMINING THE RELATIVE POSITION OF TWO SUBSTANTIALLY FLAT ELEMENTS
摘要 The invention pertains to a device for determining the relative position in the X-Y plane between two essentially flat elements that are spaced apart in the Z-direction and are essentially arranged on top of one another, wherein said device features at least one optical sensor that is arranged between the elements and is able to sense at least two points of the mutually facing surfaces of the elements, as well as an evaluation unit, in which the images of the points can be evaluated with respect to their relative position in the X-Y plane. In this case, the optical sensor features at least one line sensor that can be displaced relative to the two elements in such a way that the mutually facing surfaces of the elements can be optically scanned at least in sections in the manner of a scanner.
申请公布号 EP1924891(A1) 申请公布日期 2008.05.28
申请号 EP20060775845 申请日期 2006.08.11
申请人 ERSA GMBH 发明人 KURTZ, RAINER;CANNON, MARK;HUEBSCH, WOLFRAM;GRUMM, HARALD
分类号 G03F9/00;H05K3/00 主分类号 G03F9/00
代理机构 代理人
主权项
地址