| 摘要 |
An apparatus and a method for supplying silicon powder are provided to help the silicon powder of big size to get into an outer circumference part of a quartz furnace by increasing the filling amount of the silicon powder and the power which is applied to the silicon powder. An apparatus for supplying silicon powder includes a supply tube(20), an actuator(30) and a valve unit(40). The supply tube is filled with the silicon powder. The actuator which is able to be controlled is installed above the supply tube. The valve unit of a cone shape which is able to move in a vertical direction is installed under the supply tube, and connected with the actuator. An inclined plane of the valve unit is contacted with the bottom end of the supply tube when closing the valve unit.
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