| 摘要 |
An object is to provide an electrode for electrolysis which is preferable in generation of ozone water usable in cleaning and sterilizing of water and sewage, or cleaning in a semiconductor device manufacturing process by an electrolysis process, and a method of manufacturing this electrode for electrolysis. The surface of a conductive substrate constituting the electrode for electrolysis is coated with a noble metal such as platinum or a noble metal oxide to form an intermediate layer, further a surface layer is constituted of a dielectric material on the surface of the intermediate layer, and the surface layer is provided with holes.
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