| 摘要 |
A detector is made up of a semiconductor integrated circuit in a part, and the semiconductor integrated circuit includes a driving circuit, an AC amplifier, a detection circuit and an amplifier circuit. An input resistor that is connected to input terminals of an operational amplifier includes an internal input resistor made up of a semiconductor integrated circuit element and an external input resistor made up of an external discrete component connected to each other in parallel. Temperature characteristics of an angular velocity sensor is compensated by a temperature coefficient (alpha 3 ) that is a combination of a temperature coefficient (alpha 1 ) of the internal input resistor and a temperature coefficient (alpha 2 ) of the external input resistor.
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