| 摘要 |
The invention which sees layer and with the depth direction with automatic scanning about layer structure the interference plane a wavelength and the scanning system will be able to move, the white light interferometer and/or the low of scanning to have the interferometer and in compliance with pulley being empty is divided the meantime standard empty course leads and standard with from is empty and is guided the meantime the objective water empty course leads and the objective water with from is empty and the object where a measurement at the time of layer structure to the standard cancer and has the joining a company radiation which is guided to the cancer which will bite respects a measurement the interferometer part which is guided from a radiation unit, the standard cancer and the object to photograph the interference radiation which comes back from the cancer which will bite, electric signalWith converts [chwalsanggi] provides a minute description and measurement result the rear for includes the evaluation system which is arranged, with time measures the layer structure which becomes accomplished at the multiple layers which with depth direction are arranged about interferometry system and measurement for method is a thing.
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