发明名称 CLEANING DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a cleaning device not requiring high-pressure cleaning, having no restriction on cleaning objects, allowing a reduction in the pressure of a gas dissolving liquid without being clogged even if a foreign matter is included and capable of executing cleaning work with a high cleaning effect by avoiding a production of bubbles. SOLUTION: A pressurizing section 1 force-feeds a liquid. A gas injection section 2 injects a gas into the liquid. A pressurizing dissolving section 3 causes the gas to be dissolved in the liquid by pressurization induced by the liquid force-fed by the pressurizing section 1. A pressure reduction section 4 reduces the pressure of the gas-dissolved liquid into which the gas is dissolved by the pressurizing dissolving section 3 successively to the atmospheric pressure from the inflow side to the outflow side of the gas dissolved liquid. A discharge section 12 discharges the gas-dissolved liquid of which the pressure is reduced by the pressure reduction section 4. The cleaning device comprises the above sections, and the pressurizing section 1, the gas injection section 2 and the pressurizing dissolving section 3 are continuously operated to continuously feed the gas dissolved liquid to the pressure reduction section 4. Thus, the gas dissolved liquid free from bubbles is continuously discharged from the discharge section 12. COPYRIGHT: (C)2008,JPO&INPIT
申请公布号 JP2008114214(A) 申请公布日期 2008.05.22
申请号 JP20070002665 申请日期 2007.01.10
申请人 MATSUSHITA ELECTRIC WORKS LTD 发明人 HIROTA SHINYA;TSUJI ATSUSHI
分类号 B08B3/02;B08B3/10;B60S3/04;C23G3/00;H01L21/304 主分类号 B08B3/02
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