发明名称 SYSTEM AND METHOD OF TESTING HUMIDITY IN A SEALED MEMS DEVICE
摘要 One embodiment provides a method of testing humidity. The method includes measuring i) a first weight of a first device which encloses a plurality of interferometric modulators and ii) a second weight of a second device which encloses a plurality of interferometric modulators, wherein the first and second devices contain a different amount of water vapor. The method further includes comparing the weights of the first and second devices and determining a relative humidity value or a degree of the relative humidity inside one of the two devices based at least in part upon the weight comparison. In one embodiment, the relative humidity value or degree is determined considering at least one of the following parameters: i) temperature-humidity combination inside at least one of the devices, ii) the thickness and width of a seal of the at least one device, iii) adhesive permeability of a component of the at least one device, iv) a desiccant capacity inside the at least one device and v) a device size.
申请公布号 US2008115596(A1) 申请公布日期 2008.05.22
申请号 US20080021218 申请日期 2008.01.28
申请人 IDC, LLC 发明人 GALLY BRIAN J.;PALMATEER LAUREN;KOTHARI MANISH;CUMMINGS WILLIAMS J.
分类号 G01G9/00;B81C99/00 主分类号 G01G9/00
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