发明名称 |
PROBE UNIT AND ITS MANUFACTURING METHOD |
摘要 |
A probe unit comprises a substrate and a lead formed on the substrate and having a tip part projecting from an edge of the substrate and contacting to an electrode of a sample, and a thick part of which thickness is thicker than the tip part. The probe unit can make continuity with a sample firmly with a proper contact pressure while lowering electrical resistance of leads.
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申请公布号 |
US2008115354(A1) |
申请公布日期 |
2008.05.22 |
申请号 |
US20080970704 |
申请日期 |
2008.01.08 |
申请人 |
YAMAHA CORPORATION |
发明人 |
SUGIURA MASAHIRO;HIYAMA KUNIO;OGINO SUSUMU |
分类号 |
H01S4/00;G01R1/073;G01R3/00;G01R31/02;H05K3/10 |
主分类号 |
H01S4/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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