| 摘要 |
A wafer holder is provided to prevent the damage of a wafer or production of particles by adjusting intensity and speed of force generated by a driving motor which is applied to a push pin. A wafer(200) is fixed to an upper surface of a plate by using a push pin(222), a side pin and a notch pin, and a driving shaft(240) is rotated by a driving motor(230). A moving member is fastened to the push pin and converts rotation movement of the driving shaft into a translation movement. The moving member has a lead screw(310) enclosing a portion of the driving shaft, a movable plate(320) fastened to the push pin and meshed with the lead screw, a moving guide(330) supporting both sidewalls of the movable plate, and a position sensor(340) mounted on the moving guide for detecting a position of the movable plate.
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