| 摘要 |
PROBLEM TO BE SOLVED: To provide an inexpensive interference objective lens capable of easily obtaining not only an interference image but also a bright-field image of good contrast, and to provide an interference microscope apparatus with the interference objective lens. SOLUTION: This interference microscope apparatus comprises: the interference objective lens 1 arranged above a sample 11 and having an objective lens 10, a first beam splitter 12 and a reference surface 13; an observation optical system 2 arranged above the interference objective lens 1; and an illumination optical system 3 having a light source 14 such as a halogen lamp for emitting light from a visible range to an infrared range. The interference microscope apparatus can easily obtain not only the interference image but also the bright-field image of good contrast. COPYRIGHT: (C)2008,JPO&INPIT
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