| 发明名称 |
ELECTRONIC DEVICE HAVING ELECTRODE AND DRIVING CIRCUIT SUBSTRATE FOR DISPLAY DEVICE |
| 摘要 |
This application provides an electronic device using an oxide film of a molybdenum-tantalum alloy having a tantalum composition ratio of 50 to 97 atomic percent. According to this invention, the oxide film of the Mo-Ta alloy is higher in resistivity than the oxide film of Ta. Therefore, the TFT and MIM elements using the oxide film of the Mo-Ta alloy have a small leak electric current because of the high resistivity of the oxide film. And an anodic oxidation film of the Mo-Ta alloy of a better quality can be formed for a multi-layered insulating film. |
| 申请公布号 |
EP0273743(A3) |
申请公布日期 |
1990.05.02 |
| 申请号 |
EP19870311454 |
申请日期 |
1987.12.24 |
| 申请人 |
KABUSHIKI KAISHA TOSHIBA |
发明人 |
IKEDA, MITSUSHI C/O PATENT DIVISION;OANA, YASUHISA C/O PATENT DIVISION;DOHJO, MASAYUKI C/O PATENT DIVISION |
| 分类号 |
H01L49/02;H01L21/316;H01L21/336;H01L21/70;H01L21/77;H01L27/12;H01L29/49;H01L29/78;H01L29/786;(IPC1-7):H01L27/10;H01L21/28;G09F9/35 |
主分类号 |
H01L49/02 |
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