发明名称 METHOD FOR PRODUCING TITANIA-SILICA GLASS
摘要 <P>PROBLEM TO BE SOLVED: To provide a method which uses a raw material supplied in a stable composition and can be used for easily producing titania-silica glass of homogeneous composition. <P>SOLUTION: The method for producing the titania-silica glass comprises separately supplying a gas prepared by gasifying a liquid raw material of a silica source or a gas prepared by gasifying a liquid raw material of a titania source from either one of a first introduction pipe which is a center of a multitubular pipe of a concentric multiple pipe burner, a second introduction pipe which flanks with the periphery of the first introduction pipe, and a third introduction pipe which flanks with the periphery of the second introduction pipe, hydrolyzing the gas in oxyhydrogen flame of the burner, depositing glass particles on a target, and then subjecting the glass particles to a heat vitrifying treatment. <P>COPYRIGHT: (C)2008,JPO&INPIT
申请公布号 JP2008115054(A) 申请公布日期 2008.05.22
申请号 JP20060301254 申请日期 2006.11.07
申请人 COVALENT MATERIALS CORP 发明人 ISOMURA YOSHITOSHI
分类号 C03B8/04;C03B20/00;G03F1/60;H01L21/027 主分类号 C03B8/04
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