| 摘要 |
PROBLEM TO BE SOLVED: To enhance general versatility and availability in preparation of SECS message data. SOLUTION: An SECS message data preparing device 3 for editing/extracting an SECS message for communication between a semiconductor manufacturing device 1 and a host computer 2 is provided. The message data preparing device has a definition format using a parameter to prepare a message definition file, imports the message definition file prepared, and compiles the message definition file imported to be converted into execution data. The message definition file preparation has a definition format described by XML, and the definition format is divided into a template definition portion and an object (parameter) definition portion. Also, the message data preparing device transmits/receives the message data prepared to/from a host computer, or provides the data as a packaged component. COPYRIGHT: (C)2008,JPO&INPIT
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