| 摘要 |
PROBLEM TO BE SOLVED: To provide a downsized and highly efficient/highly functional detector to achieve downsizing of the detector, equipping of an energy filter mechanism, and equipping of a secondary electron/reflected electron selection mechanism or the like in detecting the secondary electron and the reflected electron in an electron beam application device such as a scanning electron beam microscope. SOLUTION: The downsized gas amplification type detector in which an electron incident face is separated by a low density thin film is arranged at an appropriate position in an electron beam passage retained in a high vacuum or in a sample room, and by arranging the detector in a lens magnetic field, a moving distance of an electron advancing in the detector is made large and a gas amplification rate is increased. Further, by installing an energy filter electrode at the electron incident face of the gas amplification type detector, energy selection of the secondary electron is made possible. COPYRIGHT: (C)2008,JPO&INPIT
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