| 摘要 |
Disclosed is a coordinate measuring apparatus for measuring distortion and or dimensional variations in one or more planar substrates. In one aspect, the coordinate measuring apparatus comprises a base assembly comprising a base plate having a top surface configured to receive the planar substrate; and a multi-dimensional array of image capturing devices, each image capturing device having a field of view and being positioned in a plane parallel to and in overlying registration with at least a portion of the top surface of the base plate. The plurality of image capturing devices are oriented perpendicular to the plane of the multi-dimensional array such that the field of view of each image capturing device can capture at least a portion of the top surface of the base plate. Further, each of the plurality of image capturing devices can be selectively positioned at predetermined coordinates defined within the plane of the multi-dimensional array.
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