| 摘要 |
PROBLEM TO BE SOLVED: To provide a foreign matter detecting apparatus capable of reproducing the flow of bodies to be inspected and adjusting screening timing etc. without stopping a production line. SOLUTION: The foreign matter detecting apparatus 100 is provided with both a detecting part 120 for detecting foreign matter mixed in bodies to be inspected and a control part 130, including a determining means 131 for determining the presence or absence of foreign matter on the basis of detection signals outputted from the detecting part 120, for outputting determination results outputted from the determining means 131 as screening signals for removing bodies to be inspected from a transfer path. The control part 130 comprises a determination pattern storage means 132 for storing determination pattern information on patterns which cause nondefects or defects; a pseudo determination pattern generating means 133 for generating pseudo determination results on the basis of determination pattern information at the timing of determination; and changeover means 134 for changing over in such a way that the pseudo determination results generated by the pseudo determination pattern generating means 133 may be outputted as screening signals. COPYRIGHT: (C)2006,JPO&NCIPI |
