Article i.e. semiconductor substrate, storage container storing device for use in semiconductor system, has container transportation unit transferring container to and from position unit in upper position

摘要

The device (S) has a container transportation unit for transferring an article storage container (C) to and from container support units that are arranged in storage and delivery positions. A position unit is arranged in a position corresponding to the storage and delivery positions and includes a number of position correction projections for binding position correction boreholes. The position unit is configured such that the position unit is moved between upper and lower positions. The transportation unit transfers the container to and from the position unit in the upper position.