| 发明名称 |
METHOD OF MEASUREMENT OF MICROMECHANICAL TRANSMITTER SENSOR ELASTIC SUSPENSION RIGIDITY |
| 摘要 |
FIELD: physics, instruments. ^ SUBSTANCE: said utility invention relates to instrumentation. Character: a static force within the elastic region is applied to the elastic suspension. The electric capacitance between the sensor and the displacement recording system electrode is measured. After that, electric potential is applied to the electrode, the electric capacitance between the sensor and the displacement recording system electrode is measured again, and the elastic suspension rigidity is calculated using a mathematical ratio. ^ EFFECT: increase in accuracy and simplification of micromechanical transmitter elastic suspension rigidity monitoring procedure. ^ 1 dwg ^ . |
| 申请公布号 |
RU2324917(C1) |
申请公布日期 |
2008.05.20 |
| 申请号 |
RU20060142588 |
申请日期 |
2006.12.04 |
| 申请人 |
GOSUDARSTVENNOE OBRAZOVATEL'NOE UCHREZHDENIE VYSSHEGO PROFESSIONAL'NOGO OBRAZOVANIJA "MOSKOVSKIJ GOSUDARSTVENNYJ INSTITUT EHLEKTRONNOJ TEKHNIKI (TEKHNICHESKIJ UNIVERSITET)" (MIEHT);OBSHCHESTVO S OGRANICHENNOJ OTVETSTVENNOST'JU "LABORATORIJA MIKROSISTEM" (OOO "LMS") |
发明人 |
PLEKHANOV VJACHESLAV EVGEN'EVICH;ANCHUTIN STEPAN ALEKSANDROVICH;ZOTOV SERGEJ ALEKSANDROVICH;CHAPLYGIN JURIJ ALEKSANDROVICH;TIMOSHENKOV SERGEJ PETROVICH;RUBCHITS VADIM GRIGOR'EVICH;SHILOV VALERIJ FEDOROVICH;MAKSIMOV VLADIMIR NIKOLAEVICH;BALYCHEV VLADIMIR NIKOLAEVICH;MOROZOVA ELENA SERGEEVNA;KALUGIN VIKTOR VLADIMIROVICH |
| 分类号 |
G01N3/20 |
主分类号 |
G01N3/20 |
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