WAFER KEEPING APPARATUS OF SEMICONDUCTOR DEVICE MANUFACTURING EQUIPMENT

摘要

A wafer keeping apparatus of semiconductor device manufacturing equipment is provided to protect a FOUP(Front Opening Unified Pod) by lifting or lowering a shutter, and to prevent a collision between a wafer and a robot. A wafer keeping apparatus of semiconductor device manufacturing equipment comprises an FOUP(Front Opening Unified Pod)(104), a load port(100), and a shutter unit(108). The FOUP is configured to hold wafers to be processed. The load port comprises a plate(102) to allow the FOUP to be located thereon. The shutter unit, driven by a motor, moves up and down to reach the opposite sides of the FOUP located on the plate.